Basic research for the development of national destruction or removal efficiencies for greenhouse gases in the semiconductor and display industry
우지윤* ․ 강성민** ․ 전의찬***†
Woo, Jiyun* ･ Kang, Seongmin** and Jeon, Eui-Chan***†
This is a preliminary study for the development of national destruction or removal efficiencies (DREs) related to process gases in the semiconductor and display industries. The study obtained data from workplaces that apply DREs, and confirmed the level of emission factors through data outlier treatment and calculating and comparing DREs for process gases. The study collected Tier 3 data for four types of greenhouse gases generated during semiconductor and display processes, including CF4, c-C4F8, CHF3 and SF6. We divided the data into three cases based on outlier treatment methods and calculated DREs for the semiconductor and display industries then analyzed the uncertainty of the results. All DRE values except for the Case I value of CF4 were larger than the default emission factors provided by the 2006 IPCC GL applied to the current national emission calculation. The uncertainty analysis of DREs for process gases showed that the study results had a smaller uncertainty range than the range provided by IPCC. Currently, the default emission factors provided by the 2006 IPCC GL applied to the national emission calculation in Korea may overestimate greenhouse gas emissions in the domestic semiconductor and display industries, as they do not reflect the current technological level in Korea. Therefore, there is a need to develop national DREs that reflects the domestic situation. This study can be used as a basis for improving the reliability of greenhouse gas inventories in the semiconductor and display industries for global stocktaking.
Electronics Industry, Semiconductor, Display, Greenhouse Gas, PFCs, HFCs, F-gas, DRE
1404-09.pdf
